Excelitas announced on September 23 a third-party autofocus integration for its Optem mag.x 125 platform, pairing a PFA-LN sensor and iZAA-LFOV Z-axis stage with mag.x objective lenses for inspection and metrology.
GLOBAL IMAGING BRIEF
Through-the-lens focus tracking may help inspection systems handle patterned and multilayer surfaces at higher throughput. The stated 3 kHz tracking and 40 nm positioning specifications should be validated against application conditions.
Full perspective
The announced configuration extends autofocus across the mag.x 125 lens range, including its 8X/0.32 PLAN APO objective. It combines optical tracking with a mechanically controlled Z-axis stage.
Inspection OEMs need to consider patterned-surface response, focus repeatability, mechanical travel and controller integration as a combined optical-mechanical system. Excelitas plans to show the configuration at VISION 2026 in Stuttgart on October 6–8.
Original source
Source: Excelitas release dated September 23, 2026. Technical specifications are manufacturer claims.